Description: The Philips XL-30 ESEM is a flexible scanning electron microscope with a large chamber for accomodating specimen. It can be used for conventional high vacuum imaging, or in the environmental mode, can be used to examine wet, oily, gassy or non-conducting samples. Samples can be examined in an atmosphere of up to 10 torr of water vapor, oxygen, nitrogen carbon dioxide or any other non-corrosice gas. Allows wafers of various diameters including 50 mm, 75 mm, and 100 mm. Includes a high-brightness field emission gun (FEG) operating from 200V – 30kV with 20x resolution digital imaging. Also equipped with a cooling stage to –30C and heating stage to 1500C.
POC: Jim Baughman
E-mail: jim.baughman@nasa.gov
Location: Bldg 1205; Rm 153
Training: Designated Operators
Manufacturer: Philips
Model: ESEM |
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