Description: This machine uses an etch cathode to deposit materials such as Gold, Silver, Palladium, Gold/Palladium and Platinum onto specimen. It is equipped with an integral dual stage, direct drive, and a rotary vane 3.8 cfm vacuum pump. The machine is manually controlled with an automatic vent at process termination. Occupies three (3) targets each 75mm x 55mm annulus and a stage diameter that accommodates for up to 200 mm diameter substrates. Required argon gas for operation.
POC: Harold Claytor
E-mail: harold.d.claytor@nasa.gov
Location: Bldg 1205; Rm 146
Training: Designated Operators
Manufacturer: Anatech LTD
Model: Hummer 8.0 |
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